GHz BAW Piezoelectric Transformers with High Voltage Gain using the Combination of High and Low Dielectric Constant Thin Films

Sarina Kinoshita, Takahiko Yanagitani

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Battery-less sensors for IoT require energy harvesting from the ambient environment. RF-DC conversion with a rectifying antenna (so-called rectenna) is generally used to obtain energy from ambient electromagnetic waves. However, RF-DC conversion efficiency of the diode significantly decreases for ambient electromagnetic waves due to their weak RF power. We previously reported bulk acoustic wave (BAW) piezoelectric transformers based on c-axis zig-zag ScAlN multilayer films in order to amplify the RF signal in the rectenna. In this study, we report simpler BAW transformers based on monolayer thin films with a different dielectric constant (?). The theoretical voltage gain was simulated by Mason's equivalent circuit model. We also derived the simple formula describing the voltage gain of the BAW piezoelectric transformers without using the circuit. This simpler BAW piezoelectric transformers using the combination of high and low ? thin films were demonstrated with the combination of epitaxial PZT family films and ScAlN films. S parameters of the BAW piezoelectric transformers are measured by a network analyzer. As a result, the voltage gain approaching + 18 dB in 100 MHz range was obtained. Also, the voltage gain approaching + 5 dB in 1 GHz range was obtained. This new type of BAW transformer is promising for a high voltage gain transformer in the rectenna.

本文言語English
ホスト出版物のタイトルIUS 2020 - International Ultrasonics Symposium, Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781728154480
DOI
出版ステータスPublished - 2020 9月 7
イベント2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
継続期間: 2020 9月 72020 9月 11

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2020-September
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
国/地域United States
CityLas Vegas
Period20/9/720/9/11

ASJC Scopus subject areas

  • 音響学および超音波学

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