Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films

Takahiko Yanagitani, Kazuki Arakawa, Kazuhiko Kano, Akihiko Teshigahara, Morito Akiyama

研究成果: Conference contribution

50 被引用数 (Scopus)

抄録

Giant shear mode electromechanical coupling coeficient k15' of 0.32 (k15210 %) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600 C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.

本文言語English
ホスト出版物のタイトル2010 IEEE International Ultrasonics Symposium, IUS 2010
ページ2095-2098
ページ数4
DOI
出版ステータスPublished - 2010 12 1
外部発表はい
イベント2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
継続期間: 2010 10 112010 10 14

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷版)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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