Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition

Takanori Shimizu, Masafumi Nakada, Hiroki Tsuda, Hiroshi Miyazaki, Jun Akedo, Keishi Ohashi

研究成果: Article

3 引用 (Scopus)

抜粋

Mach-Zehnder (MZ) lanthanum-modified lead-zirconatetitanate (PLZT) electro-optic modulators were fabricated on a silicon substrate by aerosol deposition. The fabricated modulator has a reversed-ridge-waveguide structure (with a 1.8-μm-wide ridge) and electrodes for applying a voltage perpendicular to the PLZT core layer. The modulator also has an MZ interferometer structure in which the device length and the electrode length of phase shifter are 1.5mm and 500μm, respectively. Optical-characteristics measurements showed that the 2-GHz optical output signal was produced by the modulator. The optical performance proves the validity of using the modulators on silicon substrates for on-chip optical interconnects.

元の言語English
ページ(範囲)1669-1675
ページ数7
ジャーナルieice electronics express
6
発行部数23
DOI
出版物ステータスPublished - 2009 12 30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

フィンガープリント Gigahertz-rate optical modulation on mach-zehnder plzt electro-optic modulators formed on silicon substrates by aerosol deposition' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用