Global standardization of scanning probe microscopy

Daisuke Fujita*, Hiroshi Itoh, Shingo Ichimura, Tomizo Kurosawa

*この研究の対応する著者

研究成果: Article査読

44 被引用数 (Scopus)

抄録

Recent efforts to achieve global standardization of scanning probe microscopy (SPM) including noncontact atomic force microscopy (NC-AFM), especially through the International Organization for Standardization (ISO) and related research, are surveyed. Since the unification of terminology for SPM is a prerequisite for standardization, it should have the first priority, followed by the unification of data management and treatment, which will enable access to and processing of SPM data collected by different types of instrument. Among the various SPM analytical methods, the dimensional metrology of SPM is regarded to be the first priority for standardization. This requires solving two basic problems: calibrating the x, y, and z coordinate axes with traceability to the SI unit of length, and eliminating the morphological artefacts caused by the shape of the probe tip. Pre-standardization efforts on restoring distorted images and characterizing the tip shape during use are discussed.

本文言語English
論文番号084002
ジャーナルNanotechnology
18
8
DOI
出版ステータスPublished - 2007 2月 28
外部発表はい

ASJC Scopus subject areas

  • バイオエンジニアリング
  • 化学 (全般)
  • 材料科学(全般)
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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