Growth of grass like architectures on Si substrate and its mechanism study

Lijiao Hu, Yang Ju, Hosoi Atsushi

研究成果: Paper査読

抄録

Grass like architectures were synthesized directly on Silicon substrate by thermal oxidation method with nickel catalyst at low temperature. Humidity and catalyst played an important role in the fabrication of the grass like architectures. The morphology of the grass-like architectures was controlled by heating temperature. The grass like architectures were observed by scanning electron microscope (SEM, JSM-7000FK), Energy-dispersive X-ray (EDX) and X-ray diffraction (XRD). The grass like architectures were approximately 8-70μm in size with 1-2.5μm width leaves. The growth of grass like architectures affected by oxidation, vertical stress induced, and horizontal compressive stress was studied in details.

本文言語English
ページ2988-2992
ページ数5
出版ステータスPublished - 2013 1 1
外部発表はい
イベント13th International Conference on Fracture 2013, ICF 2013 - Beijing, China
継続期間: 2013 6 162013 6 21

Conference

Conference13th International Conference on Fracture 2013, ICF 2013
CountryChina
CityBeijing
Period13/6/1613/6/21

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology

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