TY - GEN
T1 - Growth of O-Polar and Zn-Polar Ferroelectric MgZnO Thin Films Controlled by Sputtering Geometry
AU - Shiman, Yohkoh
AU - Takayanagi, Shinji
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research B, No. 19H02202, No. 21K18734).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Polarization-inverted multilayer devices are attractive for improving the power durability of BAW devices. To fabricate this structure, a polarization control technique is required. Two methods for controlling polarization of MgZnO are available: ion beam induced polarization inversion and external electric field induced polarization inversion. In this study, Zn-polar and O-polar MgZnO thin films were grown and we fabricated polarization-inverted multilayer structure by using ion beam induced polarization inversion. As a result, the resonator excites boldsymbol{2}{ mathbf{nd}} overtone mode, and suppresses fundamental mode. Furthermore, we report conversion loss (CL) vs external electric field ( boldsymbol{E}) hysteresis curve obtained by using external electric field induced polarization inversion.
AB - Polarization-inverted multilayer devices are attractive for improving the power durability of BAW devices. To fabricate this structure, a polarization control technique is required. Two methods for controlling polarization of MgZnO are available: ion beam induced polarization inversion and external electric field induced polarization inversion. In this study, Zn-polar and O-polar MgZnO thin films were grown and we fabricated polarization-inverted multilayer structure by using ion beam induced polarization inversion. As a result, the resonator excites boldsymbol{2}{ mathbf{nd}} overtone mode, and suppresses fundamental mode. Furthermore, we report conversion loss (CL) vs external electric field ( boldsymbol{E}) hysteresis curve obtained by using external electric field induced polarization inversion.
KW - 2overtone mode
KW - MgZnO
KW - Polarization-inversion
KW - Polarization-inverted multilayer devices
UR - http://www.scopus.com/inward/record.url?scp=85143764323&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85143764323&partnerID=8YFLogxK
U2 - 10.1109/IUS54386.2022.9958109
DO - 10.1109/IUS54386.2022.9958109
M3 - Conference contribution
AN - SCOPUS:85143764323
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -