The studies of Diamond-Like carbon (DLC) coated medical devices have reported possibility for developing blood analysis devices. DLC film is a surface modification technique for biomaterials due to their hemocompatibility, low friction, and reasonableness. We have deposited DLC film on silicon (Si), cyclic olefin polymer (COP), polycarbonate (PC), SU-8 and polydimethylsiloxane (PDMS) by using r.f. plasma enhanced chemical vapor deposition (r.f.-PECVD) method. These materials have been used extensively in micro-channel devices. The hemocompatibility, chemical composition, structure, wettability, roughness, and surface morphology of the samples have been investigated by in-vitro test with sheep blood, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), a contact angle measurement, atomic force microscopy (AFM). The result indicated that the satisfied hemocompatibility was obtained for the DLC on COP and PDMS. Moreover, it was observed that hemocompatibility was influenced by surface conditions of sample DLC coating to COP and PDMS are expected as a surface modification technique for the micro-channel with hemocompatibility.