TY - JOUR
T1 - Heteroepitaxial diamond thin film growth on Ir(0 0 1)/MgO(0 0 1) substrate by antenna-edge plasma assisted chemical vapor deposition
AU - Tachiki, Minoru
AU - Fujisaki, Toyokatsu
AU - Taniyama, Norikazu
AU - Kudo, Minoru
AU - Kawarada, Hiroshi
N1 - Funding Information:
This work is supported by a Grant-in-Aid for Center of Excellence (COE) Research from the Ministry of Education, Culture, Sports, Science and Technology. This work is also supported in part by Advanced Research Institute for Science and Engineering, Waseda University.
PY - 2002/4
Y1 - 2002/4
N2 - Heteroepitaxial (0 0 1) diamond films are successfully grown on high-quality (0 0 1)Ir/(0 0 1)MgO substrates. To enhance the epitaxial nucleation and growth of the diamond, antenna-edge microwave plasma chemical vapor deposition (MPCVD) has been used as a bias enhanced nucleation step. Subsequently, the diamond growth step is performed using conventional MPCVD in a 〈001〉 fast growth mode. Scanning electron microscope (SEM) observation and reflection high-energy electron diffraction (RHEED) reveals the epitaxial ordering of deposited film in several millimeters square area.
AB - Heteroepitaxial (0 0 1) diamond films are successfully grown on high-quality (0 0 1)Ir/(0 0 1)MgO substrates. To enhance the epitaxial nucleation and growth of the diamond, antenna-edge microwave plasma chemical vapor deposition (MPCVD) has been used as a bias enhanced nucleation step. Subsequently, the diamond growth step is performed using conventional MPCVD in a 〈001〉 fast growth mode. Scanning electron microscope (SEM) observation and reflection high-energy electron diffraction (RHEED) reveals the epitaxial ordering of deposited film in several millimeters square area.
KW - A1. Nucleation
KW - A3. Chemical vapor deposition processes
KW - A3. Vapor-phase epitaxy
KW - B1. Diamond
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U2 - 10.1016/S0022-0248(01)02067-X
DO - 10.1016/S0022-0248(01)02067-X
M3 - Article
AN - SCOPUS:0036530430
SN - 0022-0248
VL - 237-239
SP - 1277
EP - 1280
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1 4 II
ER -