HETEROEPITAXIAL GROWTH OF GaP ON SILICON BY MOLECULAR BEAM EPITAXY.

Shun ichi Gonda*, Yuichi Matsushima, Seiji Mukai, Yunosuke Makita, Osamu Igarashi

*この研究の対応する著者

研究成果: Chapter

21 被引用数 (Scopus)

抄録

Heteroepitaxial GaP layers were grown on Si substrates, misoriented by 5 degree from the (111) face toward the left bracket 100 right bracket axis, by molecular beam epitaxy (MBE). The RHEED pattern of GaP is of elongated streaks, indicating that the quality of the grown layers is good. From observation by the X-ray divergent beam method, the left bracket 111 right bracket axis of the grown layers is parallel to that of the substrate. Autodoping of Si into the epitaxial layers from the substrate is very small compared with the layers grown by CVD. Photoluminescence was measured for GaP on Si which was irradiated with an ionized nitrogen beam during MBE.

本文言語English
ホスト出版物のタイトルJpn J Appl Phys
ページ1043-1048
ページ数6
17
6
出版ステータスPublished - 1978 6
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)

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