@inproceedings{153ffe43f0ba4a64bed9d5b640a67b66,
title = "Heterogeneous integration of III-V semiconductors on Si photonics platform",
abstract = "This paper reviews development of heterogeneously integrated photonic devices on a Si platform for optical transceivers. III-V/Si laser diodes and Mach-Zehnder modulators can be fabricated using a direct wafer bonding method and show 4.6-mW output power and a VL of 0.09 Vcm on silicon-on-insulator wafers. In addition, moderate refractive-index SiOx and SiOxNy waveguides can be fabricated with a low-temperature backend process; they have a low-crosstalk (<-27 dB) and can be used to make polarization-insensitive wavelength filters on the Si platform.",
author = "T. Hiraki and T. Aihara and K. Hasebe and T. Fujii and K. Takeda and H. Nishi and T. Kakitsuka and H. Fukuda and T. Tsuchizawa and S. Matsuo",
note = "Publisher Copyright: {\textcopyright} 2018 ECS Transactions. All rights reserved. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.; 8th Symposium on SiGe, Ge, and Related Compounds: Materials, Processing, and Devices - AiMES 2018, ECS and SMEQ Joint International Meeting ; Conference date: 30-09-2018 Through 04-10-2018",
year = "2018",
doi = "10.1149/08607.0011ecst",
language = "English",
isbn = "9781510871670",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "7",
pages = "11--16",
editor = "Qizhi Liu and Jean-Michel Hartmann and Aaron Thean and Seiichi Miyazaki and Atsushi Ogura and Xiao Gong and Matty Caymax and Andreas Schulze and G. Mashi and Andreas Mai and Mikael Osting and G. Niu and David Harame",
booktitle = "ECS Transactions",
edition = "7",
}