High-κ dielectric nanofilms fabricated from titania nanosheets

Minoru Osada, Yasuo Ebina, Hiroshi Funakubo, Shintaro Yokoyama, Takanori Kiguchi, Kazunori Takada, Takayoshi Sasaki

研究成果: Article査読

170 被引用数 (Scopus)

抄録

The performance of high-κdielectric nanofilms fabricated from titania nanosheets by a solution-based layer-by-layer approach, was investigated. Multilayer films of large-sized titania nanosheets were fabricated by an electrostatic self-assembly technique using poly(diallyldimethylammonium) (PDDA) as a counter polycation. The films show a low leakage current density with a high dielectric constant of ~125 even for thickness down to 10 nm. The results clearly show that the highκ-titania nanosheets are model experimental system for prospective nanoelectronics technology and fundamental physics. The soft-chemistry-based fabrication has great potential for the rational design and construction of nanoscale devices.

本文言語English
ページ(範囲)1023-1027
ページ数5
ジャーナルAdvanced Materials
18
8
DOI
出版ステータスPublished - 2006 4 18
外部発表はい

ASJC Scopus subject areas

  • Materials Science(all)

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