High-κ dielectric nanofilms fabricated from titania nanosheets

The performance of high-κdielectric nanofilms fabricated from titania nanosheets by a solution-based layer-by-layer approach, was investigated. Multilayer films of large-sized titania nanosheets were fabricated by an electrostatic self-assembly technique using poly(diallyldimethylammonium) (PDDA) as a counter polycation. The films show a low leakage current density with a high dielectric constant of ~125 even for thickness down to 10 nm. The results clearly show that the highκ-titania nanosheets are model experimental system for prospective nanoelectronics technology and fundamental physics. The soft-chemistry-based fabrication has great potential for the rational design and construction of nanoscale devices.