High aspect ratio nanovolume glass cell array fabricated by area-selective silicon electrochemical etching process

Engineering & Materials Science

• Electrochemical etching 100%
• Aspect ratio 56%
• Glass 48%
• Silicon 48%
• Etching 32%
• Masks 29%
• Lighting 24%
• Fabrication 22%

Physics & Astronomy

• high aspect ratio 65%
• etching 46%
• glass 35%
• cells 33%
• silicon 32%
• hollow 18%
• masks 17%
• illumination 15%
• wafers 15%
• tubes 14%
• fabrication 12%

Chemical Compounds

• Etching 55%
• Glass 42%
• Anodizing 29%
• Illumination 27%
• Surface 19%