High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi, Masashi Gomi, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.

本文言語English
ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
出版社IEEE Computer Society
ISBN(電子版)9781538633830
DOI
出版ステータスPublished - 2017 10 31
イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
継続期間: 2017 9 62017 9 9

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
国/地域United States
CityWashington
Period17/9/617/9/9

ASJC Scopus subject areas

  • 音響学および超音波学

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