High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate

Junki Hayashi, Masashi Gomi, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

研究成果: Conference contribution

1 引用 (Scopus)

抄録

Leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) have a number of beneficial characteristics such as a larger electromechanical coupling factor K2 and higher phase velocity than those of Rayleigh-type SAWs. However, LSAWs and LLSAWs have inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate. To solve this problem, the authors previously reported that the attenuation of LSAWs and LLSAWs can be reduced by loading with an aluminum nitride (AlN) thin film with a higher phase velocity than that of the substrate [1,2]. However, K2 is reduced owing to the small piezoelectricity of the AlN thin film. In this study, to obtain a substrate structure with a higher K2, the propagation properties of LSAWs and LLSAWs on a LiTaO3 (LT) thin plate bonded to a quartz substrate were investigated experimentally.

元の言語English
ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
出版者IEEE Computer Society
ISBN(電子版)9781538633830
DOI
出版物ステータスPublished - 2017 10 31
イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
継続期間: 2017 9 62017 9 9

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
United States
Washington
期間17/9/617/9/9

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thin plates
quartz
acoustics
aluminum nitrides
phase velocity
attenuation
piezoelectricity
thin films
propagation
energy

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

これを引用

Hayashi, J., Gomi, M., Suzuki, M., Kakio, S., Suzaki, H., Yonai, T., ... Mizuno, J. (2017). High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091675] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091675

High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. / Hayashi, Junki; Gomi, Masashi; Suzuki, Masashi; Kakio, Shoji; Suzaki, Haruka; Yonai, Toshifumi; Kishida, Kazuhito; Mizuno, Jun.

2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8091675.

研究成果: Conference contribution

Hayashi, J, Gomi, M, Suzuki, M, Kakio, S, Suzaki, H, Yonai, T, Kishida, K & Mizuno, J 2017, High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8091675, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8091675
Hayashi J, Gomi M, Suzuki M, Kakio S, Suzaki H, Yonai T その他. High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society. 2017. 8091675 https://doi.org/10.1109/ULTSYM.2017.8091675
Hayashi, Junki ; Gomi, Masashi ; Suzuki, Masashi ; Kakio, Shoji ; Suzaki, Haruka ; Yonai, Toshifumi ; Kishida, Kazuhito ; Mizuno, Jun. / High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate. 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017.
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