High-Efficiency Air-Clad Type Silicon-Nitride Ring-Resonator for Bio-Sensing Applications

Nithi Atthi*, Manuel Mendez-Astudillo, Suruk Udomsom, Atsushi Matsumoto, Wittawat Yamwong, Nipapan Klunngien, Ukrit Mankong, Somchai Pinlaor, Kazuo Imai, Tuptim Angkaew, Atsushi Kanno, Naokatsu Yamamoto, Tetsuya Kawanishi, Toshimasa Umezawa

*この研究の対応する著者

研究成果: Conference contribution

抄録

In this paper, a high-efficiency silicon nitride (SiN) based air-clad type ring resonator that sandwiched with air cladding and SiO2 cladding for silicon photonic (SiPh) device was demonstrated. The simulation results showed that 400 nm-thick SiN waveguide have maximum coupling efficiency with a coupling loss of 7.2 dB. By using CMOS compatible process with single lithography (stepper) and reactive ion etching step, high qualities SiN waveguide was fabricated without silicon wafer warpage. The optical output characteristics of ring resonators with the free spectral range of 3.9 nm were obtained. This device can detect NaCl concentrations of 50-1000 mMole in deionized water. Therefore, SiN waveguide grating coupler is one of a promising SiPh devices for bio-sensing applications.

本文言語English
ホスト出版物のタイトルProceedings of the 2022 International Electrical Engineering Congress, iEECON 2022
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781665402064
DOI
出版ステータスPublished - 2022
イベント2022 International Electrical Engineering Congress, iEECON 2022 - Khon Kaen, Thailand
継続期間: 2022 3月 92022 3月 11

出版物シリーズ

名前Proceedings of the 2022 International Electrical Engineering Congress, iEECON 2022

Conference

Conference2022 International Electrical Engineering Congress, iEECON 2022
国/地域Thailand
CityKhon Kaen
Period22/3/922/3/11

ASJC Scopus subject areas

  • 人工知能
  • コンピュータ ネットワークおよび通信
  • コンピュータ サイエンスの応用
  • 信号処理
  • 電子工学および電気工学
  • 器械工学

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