High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz

Ko Hei Sano, Rei Karasawa, Takahiko Yanagitani

    研究成果: Conference contribution

    1 被引用数 (Scopus)

    抄録

    Ultrasonic in the frequency ranges of 20-100 MHz is not well-developed because of less applications or less suitable piezoelectric materials as shown in Table I. In a photoacoustic imaging, PVDF are usually used for ultrasonic transducers in the 10-50 MHz band. However, their electromechanical coupling coefficient kt 2 of 4% is not enough for the practical uses. To excite ultrasonic in the 20-100 MHz, 125 μm-25 μm thick piezoelectric film is required. It is difficult to fabricate such a thick piezoelectric film without a crack caused by the internal stress during the deposition. A film deposition technique can realize the piezoelectric layer on a complicated surface such as curved or concave surface, which is difficult in the case of the single crystal plate. In this study, we demonstrated high efficient 81 MHz ultrasonic generation by using 43 μm extremely thick ScAlN films.

    本文言語English
    ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
    出版社IEEE Computer Society
    ISBN(電子版)9781538633830
    DOI
    出版ステータスPublished - 2017 10月 31
    イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    継続期間: 2017 9月 62017 9月 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    国/地域United States
    CityWashington
    Period17/9/617/9/9

    ASJC Scopus subject areas

    • 音響学および超音波学

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