High electromechanical coupling in PZT epitaxial thick film resonators at 550 °C

Takahiko Yanagitani, Katsuyoshi Katada, Masashi Suzuki, Kiyotaka Wasa

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

A shift of Curie temperature is reported only in a very thin epitaxial film. In this study, unusual high temperature shift of Curie temperature in thick PZT and PbTiO3film was demonstrated. Thickness extensional mode electromechanical coupling coefficient ktof the films were extracted from high-overtone bulk acoustic resonator structure. Thick PZT epitaxial (with 4.4 μm) films exhibit high ktof 0.30 at 500 °C and 0.37 at 550 °C. Moreover, high ktof 0.42 was also observed in thick PbTiO3film (with 2.8 μm) at 550 °C.

本文言語English
ホスト出版物のタイトルIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
出版社IEEE Computer Society
ISBN(印刷版)9781479949168
DOI
出版ステータスPublished - 2014 1 1
外部発表はい
イベント2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, Province of China
継続期間: 2014 5 192014 5 22

出版物シリーズ

名前IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

Other

Other2014 IEEE International Frequency Control Symposium, IFCS 2014
CountryTaiwan, Province of China
CityTaipei
Period14/5/1914/5/22

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