High Output Power Density of 2DHG Diamond MOSFETs with Thick ALD-Al₂O₃

Engineering & Materials Science

• Aluminum oxide 62%
• Atomic layer deposition 100%
• Diamonds 65%
• Electric potential 33%
• Field effect transistors 46%
• Gases 6%
• MOSFET devices 76%
• Networks (circuits) 5%
• Oxides 9%
• Power amplifiers 10%

Chemical Compounds

• Atomic Layer Epitaxy 25%
• Diamond 61%
• Field Effect 64%
• Metal Oxide 54%
• Oxide 5%
• Polycrystalline Solid 9%
• Purity 5%
• Semiconductor 49%
• Voltage 23%