High spatial resolution EO probe using a micro-balance

T. Sugiyama, H. Hayashi, T. Ueda

研究成果: Conference contribution

抄録

A Pt stylus formed at the tip of the electrooptic (EO) probe by a focused ion beam achieves high spatial resolution. The microbalance mechanism fabricated by etching quartz crystal was employed to stabilize the probe position and to minimize the force exerted upon ICs during probe positioning. The sine wave signal was applied to the 0.84 μm wide strip line and measured by the EO probes with and without Pt stylus. The signal is not detected with an EO probe without Pt stylus, while EO probe with Pt stylus measures it with a good S/N ratio since it has a higher spatial resolution.

本文言語English
ホスト出版物のタイトルPacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Place of PublicationPiscataway, NJ, United States
出版社IEEE
ページ38-39
ページ数2
出版ステータスPublished - 1997
外部発表はい
イベントProceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim - Chiba, Jpn
継続期間: 1997 7 141997 7 18

Other

OtherProceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim
CityChiba, Jpn
Period97/7/1497/7/18

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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