抄録
A Pt stylus formed at the tip of the electrooptic (EO) probe by a focused ion beam achieves high spatial resolution. The microbalance mechanism fabricated by etching quartz crystal was employed to stabilize the probe position and to minimize the force exerted upon ICs during probe positioning. The sine wave signal was applied to the 0.84 μm wide strip line and measured by the EO probes with and without Pt stylus. The signal is not detected with an EO probe without Pt stylus, while EO probe with Pt stylus measures it with a good S/N ratio since it has a higher spatial resolution.
| 本文言語 | English |
|---|---|
| ホスト出版物のタイトル | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
| Place of Publication | Piscataway, NJ, United States |
| 出版社 | IEEE |
| ページ | 38-39 |
| ページ数 | 2 |
| 出版ステータス | Published - 1997 |
| 外部発表 | はい |
| イベント | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim - Chiba, Jpn 継続期間: 1997 7月 14 → 1997 7月 18 |
Other
| Other | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim |
|---|---|
| City | Chiba, Jpn |
| Period | 97/7/14 → 97/7/18 |
ASJC Scopus subject areas
- 物理学および天文学（全般）