High Tc/high coupling perovskite thin films

K. Wasa*, T. Matsushima, H. Adachi, T. Matsunaga, T. Yanagitani, T. Yamamoto

*この研究の対応する著者

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Ferroelectric thin films with high Curie temperature Tc and high piezoelectric coupling factor k are fascinated for a better piezoelectric MEMS. Pb(Zr, Ti)O3 (PZT)-based ferroelectric ceramics exhibit high piezoelectricity, but the Tc is not high, i.e. Tc <400°C. PZT-based piezoelectric thin films with higher Tc will be much useful. Based on a strain engineering, it is commonly understood the in-plane biaxial strain enhances the Tc of PZT thin films in a laminated composite structure. However, thickness of the PZT thin films is limited below a critical thickness typically < 50nm. Recently it has been found in-plane relaxed single crystal PZT-based thin films, i.e. PMnN-PZT(48/52) thin films, thickness above the critical thickness (typically 1μm), exhibited enhanced Tc The Tc is extraordinary high, Tc = 600°C. Their ferroelectric performances are beyond bulk PZT. The high Tc phenomena are demonstrated and the possible mechanisms of the high Tc behavior are discussed.

本文言語English
ホスト出版物のタイトル2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781479938605
DOI
出版ステータスPublished - 2014 10 13
外部発表はい
イベント2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014 - State College, United States
継続期間: 2014 5 122014 5 16

出版物シリーズ

名前2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014

Other

Other2014 Joint IEEE International Symposium on the Applications of Ferroelectric, International Workshop on Acoustic Transduction Materials and Devices and Workshop on Piezoresponse Force Microscopy, ISAF/IWATMD/PFM 2014
国/地域United States
CityState College
Period14/5/1214/5/16

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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