Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients

Takuya Matsuo, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

研究成果: Conference contribution

13 引用 (Scopus)

抜粋

A quasi-shear mode piezoelectric film with high electromechanical coupling coefficient k'15 is attractive for shear wave transducers, shear mode FBAR and SH-SAW devices. The single crystalline ideal ZnO film with c-axis-tilt angle of 28° from the surface normal of the film has high k'15 value of 0.38. In this study, we have investigated c-axis-tilted ZnO films to obtain sufficient tilt angle and good crystalline alignment using RF magnetron sputtering technique. We focused on the angle between the substrate surface and target surface during the sputtering deposition. In case that the film was deposited on the substrate set at 90° to the target surface, relatively large c-axis tilted angles of 22.6°-26.2° were obtained. Moreover, small ψ-scan FWHM values from 6.7° to 7.8° of the film indicated good crystalline alignment. Finally, k'15 value of this film was estimated as 0.26, which was the highest value ever reported for c-axis-tilted ZnO or AlN films.

元の言語English
ホスト出版物のタイトル2007 IEEE Ultrasonics Symposium Proceedings, IUS
ページ1229-1232
ページ数4
DOI
出版物ステータスPublished - 2007 12 1
外部発表Yes
イベント2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
継続期間: 2007 10 282007 10 31

出版物シリーズ

名前Proceedings - IEEE Ultrasonics Symposium
ISSN(印刷物)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
United States
New York, NY
期間07/10/2807/10/31

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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  • これを引用

    Matsuo, T., Yanagitani, T., Matsukawa, M., & Watanabe, Y. (2007). Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients. : 2007 IEEE Ultrasonics Symposium Proceedings, IUS (pp. 1229-1232). [4409882] (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2007.309