Hyperthermal O3 beam produced by laser ablation of solid-ozone film

Tetsuya Nishiguchi, Yoshiki Morikawa, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

研究成果: Article査読

5 被引用数 (Scopus)


In order to obtain a highly concentrated hyperthermal ozone beam for more effective Si oxidation, we performed laser ablation of solid-ozone. A KrF pulse laser was irradiated onto solidified ozone on a sapphire substrate cooled to 30 to 60 K using a cryocooler. A mixture of ozone, molecular oxygen and atomic oxygen was detected using a time-of-flight method through a quadrupole mass filter. The velocity distribution of ablated ozone molecules was almost the same as the distribution at thermal equilibrium. An ozone beam with a fitted temperature of 2500 K and maximum translational energy of 3 eV was obtained under optimum laser conditions.

ジャーナルJapanese journal of applied physics
11 B
出版ステータスPublished - 2000 11月 15

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)


「Hyperthermal O3 beam produced by laser ablation of solid-ozone film」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。