Hyperthermal O3 beam produced by laser ablation of solid-ozone film

Tetsuya Nishiguchi, Yoshiki Morikawa, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

研究成果: Article査読

5 被引用数 (Scopus)

抄録

In order to obtain a highly concentrated hyperthermal ozone beam for more effective Si oxidation, we performed laser ablation of solid-ozone. A KrF pulse laser was irradiated onto solidified ozone on a sapphire substrate cooled to 30 to 60 K using a cryocooler. A mixture of ozone, molecular oxygen and atomic oxygen was detected using a time-of-flight method through a quadrupole mass filter. The velocity distribution of ablated ozone molecules was almost the same as the distribution at thermal equilibrium. An ozone beam with a fitted temperature of 2500 K and maximum translational energy of 3 eV was obtained under optimum laser conditions.

本文言語English
ページ(範囲)L1200-L1202
ジャーナルJapanese journal of applied physics
39
11 B
出版ステータスPublished - 2000 11 15
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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