### 抜粋

The authors investigated the effect of scanning-electron-microscope image noise on the accuracy of line-edge-roughness and line-widthroughness (LER/LWR) statistics extracted from power spectral densities (PSDs). To do this, they numerically prepared pseudo-experimental PSDs of LWR using the Monte Carlo (MC) method. The estimation error n decreased with the total number N_{ALL} of width data points in the same way as that observed in the absence of the image noise. n first increased gradually with the image-noise intensity R but markedly when R went beyond the threshold value Rth determined by the ratio of the sampling interval δy to the correlation length δy. The PSDs with these R_{th}'s had the same maximum-to-minimum ratio γ (= 10 in this study). The authors approximated n by BN_{ALL}-3/4(1+g(R,δ;- 3/8 [1 + g(R;δy/epsi;γ where B is 49. They also empirically determined the functional form of g(R;δy/γεγ). Because these functions well fitted massive MC simulation results, they provide guidelines for setting up analysis conditions for securing arbitrarily prescribed accuracy.

元の言語 | English |
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記事番号 | 016602 |

ジャーナル | Japanese Journal of Applied Physics |

巻 | 50 |

発行部数 | 1 |

DOI | |

出版物ステータス | Published - 2011 1 |

外部発表 | Yes |

### ASJC Scopus subject areas

- Engineering(all)
- Physics and Astronomy(all)

## フィンガープリント Image-noise effect on discrete power spectrum of line-edge and line-width roughness' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

## これを引用

*Japanese Journal of Applied Physics*,

*50*(1), [016602]. https://doi.org/10.1143/JJAP.50.016602