抄録
In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H2. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10-4 mm3, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10-4 mm3.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 727-729 |
| ページ数 | 3 |
| ジャーナル | Vacuum |
| 巻 | 48 |
| 号 | 7-9 |
| DOI | |
| 出版ステータス | Published - 1997 9月 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜