Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor

Takuya Wakabayashi, Shinji Takayanagi, Mami Matukawa, Yuta Takamura, Takahiko Yanagitani

研究成果: Conference contribution

抄録

Shear horizontal surface acoustic wave (SH-SAW) sensors have been studied for measurements of liquid properties. The long-distance propagation of SH-SAW with multiple wave roundtrips on a pipe surface improve the measurement sensitivity. c-Axis parallel oriented ZnO films can excite the SH-SAW and be grown on a curved surface by a sputtering deposition. In this study, the ZnO film growths on pipe surfaces with various pipe diameters were demonstrated. The c-axis parallel oriented ZnO film with high orientation was only obtained on the pipe surface facing the sputtering target plane. A slit which limits the deposition area and an automatic rotation system of the pipe were effective for the uniform film growth on the entire pipe surface. This film/pipe substrate structure is a good candidate for the SHSAW sensor with high sensitivity.

本文言語English
ホスト出版物のタイトル2019 IEEE International Ultrasonics Symposium, IUS 2019
出版社IEEE Computer Society
ページ671-674
ページ数4
ISBN(電子版)9781728145969
DOI
出版ステータスPublished - 2019 10月
イベント2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
継続期間: 2019 10月 62019 10月 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2019-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
国/地域United Kingdom
CityGlasgow
Period19/10/619/10/9

ASJC Scopus subject areas

  • 音響学および超音波学

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