TY - GEN
T1 - Improvement of Electromechanical Coupling Coefficient of Piezoelectric LiNbO3by Doping Praseodymium
AU - Nakamura, Kae
AU - Kudo, Shinya
AU - Jia, Junjun
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.
AB - The c-axis oriented LiNbO3 (LN) and praseodymium (Pr) doped LN films were fabricated by RF magnetron sputtering. The epitaxial growth of the films was confirmed by the measurement of XRD pole figure. Their electromechanical coupling coefficient k-{t}{2} were estimated by the conversion loss method. The minimum conversion loss for the Pr-LN film was measured to be 14 dB at 1.5 GHz along the film thickness direction. The k-{t}{2} value of Pr - LN film was improved to 2.2% from 0.8% of epitaxial LN film, demonstrating that doping Pr into LN film is a good way of improving the electromechanical coupling coefficient of piezoelectric LN film.
KW - electromechanical coupling coefficient
KW - epitaxial films
KW - LiNbO
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U2 - 10.1109/IUS54386.2022.9958265
DO - 10.1109/IUS54386.2022.9958265
M3 - Conference contribution
AN - SCOPUS:85143826937
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -