This paper presents a fabrication method of in-channel three-dimensional micromesh structures using conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Number of exposures and irradiation angles decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated using the same Cr pattern on the glass substrate. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis systems (μTAS), the microfilter was fabricated and its filtering property was demonstrated.
|ジャーナル||Sensors and Actuators, A: Physical|
|出版ステータス||Published - 2004 3月 1|
|イベント||Micromechanics Section of Sensors and Actuators, based on - Kyoto, Japan|
継続期間: 2003 1月 19 → 2003 1月 23
ASJC Scopus subject areas