In-situ X-ray monitoring in MOVPE and feedback growth of strained InGaAs

T. Tsuchiya, T. Taniwatari, K. Uomi, T. Kawano, Y. Ono

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

Metalorganic chemical vapor deposition (MOVPE) has been intensively studied for thinlayer growth along with molecular beam epitaxy (MBE). Recently, in-situ monitoring has become more important for the evaluation and the precise control of epitaxial growth. In MBE, reflection high-energy electron diffraction (RHEED) (1) has often been used for the in-situ monitoring. RHEED, however, can not be applied to MOVPE due to its relatively high growth pressure (>10 torr). Therefore, only a few methods (2) not sensitive to growth pressure, have been reported for in-situ monitoring in MOVPE. In this paper, in-situ X-ray monitoring is introduced, for the first time, in MOVPE. Moreover, feedback growth of InGaAs composition is demonstrated using the insitu X-ray monitoring.

本文言語English
ホスト出版物のタイトルLEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992
出版社Institute of Electrical and Electronics Engineers Inc.
ページ646-649
ページ数4
ISBN(電子版)0780305221, 9780780305229
DOI
出版ステータスPublished - 1992 1 1
外部発表はい
イベントLEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992 - Newport, United States
継続期間: 1992 4 211992 4 24

出版物シリーズ

名前LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992

Conference

ConferenceLEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - 4th International Conference on Indium Phosphide and Related Materials, IPRM 1992
国/地域United States
CityNewport
Period92/4/2192/4/24

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子材料、光学材料、および磁性材料
  • コンピュータ ネットワークおよび通信
  • 原子分子物理学および光学

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