Inertial unit for multi-motion detection

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

研究成果: Conference article

抜粋

Monitoring motion parameters are increasingly important in automotive and robotics applications, where cheap sensors are highly desirable. A silicon micromachined structure 0.5X2cm in size was designed and fabricated, which can detect not only translational acceleration, but angular acceleration or rate simultaneously and independently, which has a particular merit since it theoretically allows single point detection of all 6 axis of freedom using only three sensors. This is accomplished by capacitive detection of the displacement and the tilt of the seismic mass, symmetrically suspended by two torsion bars. The expected linear dependencies of the output signal on translational and angular accelerations, as well as quadratic dependency on angular rate could be verified. It is shown, that the dynamic response is improved by vacuum packaging.

元の言語English
ジャーナルSAE Technical Papers
DOI
出版物ステータスPublished - 1996 1 1
イベントInternational Congress and Exposition - Detroit, MI, United States
継続期間: 1996 2 261996 2 29

    フィンガープリント

ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering

これを引用

Mizuno, J., Nottmeyer, K., Cabuz, C., Minami, K., Kobayashi, T., & Esashi, M. (1996). Inertial unit for multi-motion detection. SAE Technical Papers. https://doi.org/10.4271/960548