Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films

Masashi Suzuki, Takahiko Yanagitani

研究成果: Conference contribution

4 引用 (Scopus)

抄録

C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.

元の言語English
ホスト出版物のタイトルProceedings - IEEE Ultrasonics Symposium
ページ1478-1481
ページ数4
DOI
出版物ステータスPublished - 2010
外部発表Yes
イベント2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
継続期間: 2010 10 112010 10 14

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
United States
San Diego, CA
期間10/10/1110/10/14

Fingerprint

acoustic properties
shear
S waves
resonators
longitudinal waves
voids
scanning electron microscopy
composite materials
wavelengths

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

これを引用

Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. / Suzuki, Masashi; Yanagitani, Takahiko.

Proceedings - IEEE Ultrasonics Symposium. 2010. p. 1478-1481 5935561.

研究成果: Conference contribution

Suzuki, M & Yanagitani, T 2010, Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. : Proceedings - IEEE Ultrasonics Symposium., 5935561, pp. 1478-1481, 2010 IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 10/10/11. https://doi.org/10.1109/ULTSYM.2010.5935561
Suzuki, Masashi ; Yanagitani, Takahiko. / Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. Proceedings - IEEE Ultrasonics Symposium. 2010. pp. 1478-1481
@inproceedings{287f6cd5f0dc49f2945c0be6549db15c,
title = "Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films",
abstract = "C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.",
keywords = "Acoustic properties, AlN, c-axis tlted film, Shadowing effect, Sputtering deposition",
author = "Masashi Suzuki and Takahiko Yanagitani",
year = "2010",
doi = "10.1109/ULTSYM.2010.5935561",
language = "English",
isbn = "9781457703829",
pages = "1478--1481",
booktitle = "Proceedings - IEEE Ultrasonics Symposium",

}

TY - GEN

T1 - Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films

AU - Suzuki, Masashi

AU - Yanagitani, Takahiko

PY - 2010

Y1 - 2010

N2 - C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.

AB - C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.

KW - Acoustic properties

KW - AlN

KW - c-axis tlted film

KW - Shadowing effect

KW - Sputtering deposition

UR - http://www.scopus.com/inward/record.url?scp=80054744552&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80054744552&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2010.5935561

DO - 10.1109/ULTSYM.2010.5935561

M3 - Conference contribution

AN - SCOPUS:80054744552

SN - 9781457703829

SP - 1478

EP - 1481

BT - Proceedings - IEEE Ultrasonics Symposium

ER -