The influence of substrates on magnetic property and crystalline orientation of CoCrTa/TiCr perpendicular magnetic recording medium was investigated using a glass plate and a Si(100) single crystal. Magnetic measurements revealed that the film sputtered on a Si(100) substrate possessed a higher perpendicular coercive force than that on glass, where the pretreatment of the Si(100) substrate by aqueous HF solution effectively improved the magnetic properties. X-ray diffraction analysis of the films indicated that the crystallinity of the TiCr layer formed on the Si(100) substrate with the HF pretreatment was higher than that on the glass substrate. It was also found that CoCrTa and TiCr layers on the Si(100) substrate with the HF pretreatment had a narrower distribution of their c-axis orientation than those on glass substrate. The results of X-ray diffraction analysis were consistent with those of the TEM observation for cross-section bright- and dark-field images and the corresponding THEED patterns. These results suggest that the crystalline surface of the Si(100) substrate with HF pretreatment has the effect of inducing preferred orientation in the TiCr underlayer, which leads to a decrease in distribution of the c-axis orientation of Co grains in the CoCrTa layer, resulting in an increase in the perpendicular coercive force.
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