抄録
We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.
| 本文言語 | English |
|---|---|
| ページ | 268-271 |
| ページ数 | 4 |
| 出版ステータス | Published - 2001 1月 1 |
| イベント | 2001 International Conference on Indium Phosphide and Related Materials - Nara, Japan 継続期間: 2001 5月 14 → 2001 5月 18 |
Conference
| Conference | 2001 International Conference on Indium Phosphide and Related Materials |
|---|---|
| 国/地域 | Japan |
| City | Nara |
| Period | 01/5/14 → 01/5/18 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学