Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD

Jing sheng MA, Hiroshi Kawarada, Takao Yonehara, Jun ichi Suzuki, Jin Wei, Yoshihiro Yokota, Hirotaro Mori, Hiroshi Fujita, Akio Hiraki

研究成果: Article

13 引用 (Scopus)

抄録

Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.

元の言語English
ページ(範囲)572-579
ページ数8
ジャーナルApplied Surface Science
41-42
発行部数C
DOI
出版物ステータスPublished - 1989 11 2
外部発表Yes

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Diamond
Chemical vapor deposition
Diamonds
diamonds
vapor deposition
Plasmas
polyhedrons
UHV power transmission
abrasives
Substrates
lamella
Abrasives
Powders
low concentrations
high voltages
Nucleation
Electron microscopes
electron microscopes
nucleation
Defects

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

これを引用

Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. / MA, Jing sheng; Kawarada, Hiroshi; Yonehara, Takao; Suzuki, Jun ichi; Wei, Jin; Yokota, Yoshihiro; Mori, Hirotaro; Fujita, Hiroshi; Hiraki, Akio.

:: Applied Surface Science, 巻 41-42, 番号 C, 02.11.1989, p. 572-579.

研究成果: Article

MA, JS, Kawarada, H, Yonehara, T, Suzuki, JI, Wei, J, Yokota, Y, Mori, H, Fujita, H & Hiraki, A 1989, 'Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD' Applied Surface Science, 巻. 41-42, 番号 C, pp. 572-579. https://doi.org/10.1016/0169-4332(89)90124-4
MA, Jing sheng ; Kawarada, Hiroshi ; Yonehara, Takao ; Suzuki, Jun ichi ; Wei, Jin ; Yokota, Yoshihiro ; Mori, Hirotaro ; Fujita, Hiroshi ; Hiraki, Akio. / Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. :: Applied Surface Science. 1989 ; 巻 41-42, 番号 C. pp. 572-579.
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AU - MA, Jing sheng

AU - Kawarada, Hiroshi

AU - Yonehara, Takao

AU - Suzuki, Jun ichi

AU - Wei, Jin

AU - Yokota, Yoshihiro

AU - Mori, Hirotaro

AU - Fujita, Hiroshi

AU - Hiraki, Akio

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