INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR AlxGa1 - xAs USING AES.

S. Ichimura, M. Aratama, R. Shimizu

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.

本文言語English
ページ(範囲)34-36
ページ数3
ジャーナルJournal of vacuum science & technology
18
1
DOI
出版ステータスPublished - 1981 1 1
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)

フィンガープリント 「INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR Al<sub>x</sub>Ga<sub>1 -</sub> <sub>x</sub>As USING AES.」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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