抄録
A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 34-36 |
| ページ数 | 3 |
| ジャーナル | Journal of vacuum science & technology |
| 巻 | 18 |
| 号 | 1 |
| DOI | |
| 出版ステータス | Published - 1981 1 1 |
| 外部発表 | はい |
ASJC Scopus subject areas
- Engineering(all)