Investigation of PD-CU-SI metallic glass film for hysterisis-free and fast response capacitive mems hydrogen sensors

Yumi Hayashi, Hiroaki Yamazaki, Daiki Ono, Kei Masunishi, Tamio Ikehashi

研究成果: Conference contribution

抄録

We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.

本文言語English
ホスト出版物のタイトルTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ311-314
ページ数4
ISBN(電子版)9781538627310
DOI
出版ステータスPublished - 2017 7 26
外部発表はい
イベント19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
継続期間: 2017 6 182017 6 22

出版物シリーズ

名前TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
国/地域Taiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

ASJC Scopus subject areas

  • 化学的な安全衛生
  • 器械工学
  • 電子工学および電気工学

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