Investigation on the hardness and morphology of Be-Cu for probing Al layers

M. Saito, G. Kimoto, T. Homma

研究成果: Conference contribution

抄録

In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

本文言語English
ホスト出版物のタイトルNanotechnology (General) - 218th ECS Meeting
ページ65-72
ページ数8
38
DOI
出版ステータスPublished - 2011 12 1
イベントNanotechnology General Session - 218th ECS Meeting - Las Vegas, NV, United States
継続期間: 2010 10 102010 10 15

出版物シリーズ

名前ECS Transactions
番号38
33
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

Conference

ConferenceNanotechnology General Session - 218th ECS Meeting
CountryUnited States
CityLas Vegas, NV
Period10/10/1010/10/15

ASJC Scopus subject areas

  • Engineering(all)

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