Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences

Yukio Fujiwara*, Kouji Kondou, Yoshikazu Teranishi, Hidehiko Nonaka, Naoaki Saito, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

*この研究の対応する著者

研究成果: Article査読

6 被引用数 (Scopus)

抄録

Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex which has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, the interaction between Ir4 (CO)n+ ions (n = 0-12) and silicon substrates was studied at a beam energy ranging from 2 keV to 10 keV at normal incidence. By adjusting Wien-filter voltage, the influence of CO ligands was investigated. Experimental results showed that sputtering yield of silicon bombarded with Ir4 (CO)n+ ions at 10 keV decreased with the number of CO ligands. In the case of 2 keV, deposition tended to be suppressed by removing CO ligands from the impinging cluster ions. The influence of CO ligands was explained by considering changes in surface properties caused by the irradiation of Ir4 (CO)n+ ions. It was also found that the bombardment with Ir4 (CO)7+ions at 2.5 keV caused deposition on silicon target.

本文言語English
ページ(範囲)653-657
ページ数5
ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
257
1-2 SPEC. ISS.
DOI
出版ステータスPublished - 2007 4月
外部発表はい

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学

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