Lanthanum-modified lead zirconate titanate electro-optic modulators fabricated using aerosol deposition for LSI interconnects

Masafumi Nakada*, Takanori Shimizu, Hiroshi Miyazaki, Hiroki Tsuda, Jun Akedo, Keishi Ohashi

*この研究の対応する著者

研究成果: Article査読

4 被引用数 (Scopus)

抄録

We developed lanthanum-modified lead zirconate titanate (PLZT), electro-optic modulators using aerosol deposition (AD). AD of complex oxide films on Si substrates is achievable, leading to the possible integration of these modulators into semiconductor integrated circuits. Polarization was measured in PLZT optical waveguides that were 1.8μm in width, and ferroelectric hysteresis loops were observed. Mach- Zehnder interferometer (MZI) PLZT modulators were demonstrated with 500-μm-length electrodes, and the insertion loss of the MZI modulators changed with applied electric field. Their change in insertion loss exhibited hysteresis loops, which were comparable to their ferroelectric ones. We obtained a 2-GHz optical output signal with a relevant bias voltage.

本文言語English
ページ(範囲)09KA061-09KA064
ジャーナルJapanese journal of applied physics
48
9 Part 2
DOI
出版ステータスPublished - 2009 12 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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