LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA.

Hiroshi Kawarada, King Sheng Mar, Akio Hiraki

研究成果: Chapter

105 引用 (Scopus)

抄録

Large area chemical vapor deposition of diamond has been obtained using magneto-microwave plasma. The important point of the developed system is to set the electron cyclotron resonance condition (875 G), where the highest plasma density is expected, at the deposition area by controlling the distribution of an applied magnetic field. Even in 10 Torr where complete electron gyrations cannot be expected, the size of the discharge area controlled by the magnetic field is 70-80 mm in diameter. This value is the largest of all plasma deposition systems of diamond. The crystallinity obtained by the above-mentioned plasma compares favorably with those of the best ones by previous methods.

元の言語English
ホスト出版物のタイトルJapanese Journal of Applied Physics, Part 2: Letters
26
エディション6
出版物ステータスPublished - 1987 6
外部発表Yes

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Chemical vapor deposition
Diamonds
Microwaves
Magnetic fields
Plasmas
Plasma deposition
Electron cyclotron resonance
Plasma density
Electrons

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Kawarada, H., Mar, K. S., & Hiraki, A. (1987). LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA.Japanese Journal of Applied Physics, Part 2: Letters (6 版, 巻 26)

LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA. / Kawarada, Hiroshi; Mar, King Sheng; Hiraki, Akio.

Japanese Journal of Applied Physics, Part 2: Letters. 巻 26 6. 編 1987.

研究成果: Chapter

Kawarada, H, Mar, KS & Hiraki, A 1987, LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA.Japanese Journal of Applied Physics, Part 2: Letters. 6 Edn, 巻. 26.
Kawarada H, Mar KS, Hiraki A. LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA. : Japanese Journal of Applied Physics, Part 2: Letters. 6 版 巻 26. 1987
Kawarada, Hiroshi ; Mar, King Sheng ; Hiraki, Akio. / LARGE AREA CHEMICAL VAPOUR DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETO-MICROWAVE PLASMA. Japanese Journal of Applied Physics, Part 2: Letters. 巻 26 6. 版 1987.
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