LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.

Hiroshi Tanino, Koichiro Hoh, Masahiro Hirata, Shirigo Ichimura, Nobufumi Atoda, Takio Tomimiasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

研究成果: Conference contribution

本文言語English
ホスト出版物のタイトルConference on Solid State Devices and Materials
出版社Business Cent for Academic Soc Japan
ページ30-31
ページ数2
ISBN(印刷版)4930813042
出版ステータスPublished - 1983
外部発表はい

出版物シリーズ

名前Conference on Solid State Devices and Materials

ASJC Scopus subject areas

  • Engineering(all)

引用スタイル