Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira; Tetsuro Segawa; Kenji Nagai; Katsuyuki Utaka; Masashi Nakao

Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

基幹理工学部

研究成果: Article › 査読

15 被引用数 (Scopus)

抄録

We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

本文言語	English
ページ（範囲）	1085-1089
ページ数	5
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	41
号	2 B
出版ステータス	Published - 2002 2 1

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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引用スタイル

@article{c39a1abc172445ec81e68d5290981850,

title = "Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography",

abstract = "We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.",

keywords = "Laser holography, Milling, Photonic crystal, Sub-wavelength structure, Wet etching",

author = "Tomoaki Ohira and Tetsuro Segawa and Kenji Nagai and Katsuyuki Utaka and Masashi Nakao",

year = "2002",

month = feb,

day = "1",

language = "English",

volume = "41",

pages = "1085--1089",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "2 B",

}

TY - JOUR

T1 - Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

AU - Ohira, Tomoaki

AU - Segawa, Tetsuro

AU - Nagai, Kenji

AU - Utaka, Katsuyuki

AU - Nakao, Masashi

PY - 2002/2/1

Y1 - 2002/2/1

N2 - We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

AB - We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

KW - Laser holography

KW - Milling

KW - Photonic crystal

KW - Sub-wavelength structure

KW - Wet etching

UR - http://www.scopus.com/inward/record.url?scp=0036478730&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036478730&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0036478730

VL - 41

SP - 1085

EP - 1089

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 2 B

ER -