抄録
We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.
本文言語 | English |
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ページ(範囲) | 1085-1089 |
ページ数 | 5 |
ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
巻 | 41 |
号 | 2 B |
DOI | |
出版ステータス | Published - 2002 2月 |
ASJC Scopus subject areas
- 工学(全般)
- 物理学および天文学(全般)