抄録
We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 1085-1089 |
| ページ数 | 5 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 41 |
| 号 | 2 B |
| DOI | |
| 出版ステータス | Published - 2002 2月 |
ASJC Scopus subject areas
- 工学（全般）
- 物理学および天文学（全般）