抜粋
We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 1085-1089 |
| ページ数 | 5 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 41 |
| 発行部数 | 2 B |
| 出版物ステータス | Published - 2002 2 1 |
フィンガープリント
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
これを引用
Ohira, T., Segawa, T., Nagai, K., Utaka, K., & Nakao, M. (2002). Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 41(2 B), 1085-1089.