Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira*, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

*この研究の対応する著者

研究成果: Article査読

15 被引用数 (Scopus)

抄録

We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

本文言語English
ページ(範囲)1085-1089
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
41
2 B
DOI
出版ステータスPublished - 2002 2月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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