Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

研究成果: Article

15 引用 (Scopus)

抜粋

We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

元の言語English
ページ(範囲)1085-1089
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
41
発行部数2 B
出版物ステータスPublished - 2002 2 1

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ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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