Large area nano pattern fabrication using improved step and repeat UV nanoimprint

Kentaro Ishibashi*, Hiroshi Goto, Takashi Kasahara, Jun Mizuno, Shuichi Shoji

*この研究の対応する著者

研究成果査読

抄録

Continuous nano structures whose sizes 100 nm line and space were successfully fabricated using two step nanoimprint including oxygen (O 2) plasma irradiation on a silicon substrate in 8 × 56 mm 2 area. Silicon substrate surface condition is important property because fine and continuous pattern forming depend on photo curable resin uniform coating. O 2 plasma irradiation is realized to change into hydrophilic without damage for silicon substrate. The water contact angle was decreased to smaller than 40° after O 2 plasma irradiation. Therefore O 2 plasma irradiation has an advantage of treatment process for continuous nanostructure forming. Our activities on UV nanoimprint lithography are expected to be progress for large area continuous nano structures fabrication.

本文言語English
ページ(範囲)235-238
ページ数4
ジャーナルJournal of Photopolymer Science and Technology
25
2
DOI
出版ステータスPublished - 2012

ASJC Scopus subject areas

  • ポリマーおよびプラスチック
  • 有機化学
  • 材料化学

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