Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong; Minoru Tachiki; Hitoshi Umezawa; Toyokatsu Fujisaki; Hiroshi Kawarada; Iwao Ohdomari

doi:10.1002/cvde.200304168

Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong^*, Minoru Tachiki, Hitoshi Umezawa, Toyokatsu Fujisaki, Hiroshi Kawarada, Iwao Ohdomari

^*この研究の対応する著者

基幹理工学部

研究成果: Article › 査読

19 被引用数 (Scopus)

抄録

The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

本文言語	English
ページ（範囲）	125-128
ページ数	4
ジャーナル	Chemical Vapor Deposition
巻	10
号	3
DOI	https://doi.org/10.1002/cvde.200304168
出版ステータス	Published - 2004 6月 1

ASJC Scopus subject areas

化学 (全般)
表面および界面
プロセス化学およびプロセス工学

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abstract = "The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.",

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AU - Kawarada, Hiroshi

AU - Ohdomari, Iwao

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Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

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