Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong, Minoru Tachiki, Hitoshi Umezawa, Toyokatsu Fujisaki, Hiroshi Kawarada, Iwao Ohdomari

研究成果: Article査読

19 被引用数 (Scopus)

抄録

The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

本文言語English
ページ(範囲)125-128
ページ数4
ジャーナルChemical Vapor Deposition
10
3
DOI
出版ステータスPublished - 2004 6 1

ASJC Scopus subject areas

  • Chemistry(all)
  • Surfaces and Interfaces
  • Process Chemistry and Technology

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