LIFETIME CONTROL BY OXIDE PRECIPITATES.

R. Ohtaki, Y. Matsushita, M. Tajima

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

Relationship between oxide precipitates, which are one of the important microdefects in typical CZ Si wafers, and a minority carrier recombination lifetime was studied in detail. It was found that the critical size of the oxide precipitates, which act as lifetime killers, is approximately 200-300 A in diameter, and that the lifetime is a strong function of the density of precipitates. If the size is smaller than the critical size, precipitates will not work as lifetime killers, no matter how high their density is. Furthermore, it was found that the annealing at 450 degree C for 64 hours produces a new deep level, which makes the lifetime remarkably small.

本文言語English
ホスト出版物のタイトルUnknown Host Publication Title
出版社Metallurgical Soc of AIME
ページ571-577
ページ数7
ISBN(印刷版)0895204851
出版ステータスPublished - 1985
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)

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