Liquid Metal as Electrical Interface Material with Temporal Stability and Stretch Tolerance

Takashi Sato, Kento Yamagishi, Michinao Hashimoto, Eiji Iwase

研究成果: Conference contribution

抄録

Electrical interface material (EIM) is an important component to develop stretchable electronics. Currently available EIMs suffer from the trade-off between low value and stretch tolerance of contact resistance. To overcome this challenge, we demonstrated the use of liquid metal (LM) as an EIM between solid metal (SM) pads for stretchable electronic devices. With LM, we achieved low contact resistance with temporal stability and stretch tolerance. Our study suggested that the contact resistance between an LM and an SM decreases over time due to alloying, and the contact resistance was reduced to 18.6% in 103 days by ensuring the electrical connection under vacuum during the fabrication. Furthermore, the use of the LM as an EIM enabled maintaining the change in contact resistance below 9% during 100% stretching deformation repeated 100 times. These results suggest that LM can be used as an EIM with temporal stability and stretch tolerance.

本文言語English
ホスト出版物のタイトル34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
出版社Institute of Electrical and Electronics Engineers Inc.
ページ689-692
ページ数4
ISBN(電子版)9781665419123
DOI
出版ステータスPublished - 2021 1 25
イベント34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 - Virtual, Gainesville, United States
継続期間: 2021 1 252021 1 29

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2021-January
ISSN(印刷版)1084-6999

Conference

Conference34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
国/地域United States
CityVirtual, Gainesville
Period21/1/2521/1/29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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