Lithography Experiments using Synchrotron Radiation from ETL Storage Ring

Koichiro Hoh, Masahiro Hirata, Nobufumi Atoda, Hiroshi Tanino, Shingo Ichimura, Hideo Onuki

研究成果: Article査読

本文言語English
ページ(範囲)765
ページ数1
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
22pt1
4
DOI
出版ステータスPublished - 1983
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

引用スタイル