Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate

Junki Hayashi, Masashi Suzuki, Toshifumi Yonai, Kosuke Yamaya, Shoji Kakio, Kazuhito Kishida, Shiori Asakawa, Hiroyuki Kuwae, Jun Mizuno

研究成果: Conference contribution

2 引用 (Scopus)

抜粋

To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation on the metallized surface of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz structure was calculated to be 0.0005 dB/1 at the normalized LT thin-plate thickness h/λ=0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-quartz structure. Using a finite element method (FEM) system, for the X31°Y-LT/X32°Y-Q model, the admittance ratio and Q factor were improved to 117 dB and 57,000 from 63 dB and 1,100 for the X31°Y-LT/AT45°X-Q model, respectively. On the basis of these results, several bonded samples were fabricated, and the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K2) and Q factor increased to 5.6% and 282 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency (TCF) of the LLSAW was measured to be -26.2 ppm/°C.

元の言語English
ホスト出版物のタイトル2018 IEEE International Ultrasonics Symposium, IUS 2018
出版者IEEE Computer Society
2018-October
ISBN(電子版)9781538634257
DOI
出版物ステータスPublished - 2018 12 17
イベント2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
継続期間: 2018 10 222018 10 25

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
Japan
Kobe
期間18/10/2218/10/25

    フィンガープリント

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

これを引用

Hayashi, J., Suzuki, M., Yonai, T., Yamaya, K., Kakio, S., Kishida, K., Asakawa, S., Kuwae, H., & Mizuno, J. (2018). Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate. : 2018 IEEE International Ultrasonics Symposium, IUS 2018 (巻 2018-October). [8579715] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2018.8579715