Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO 3 Thin Plate Bonded to Quartz Substrate

Junki Hayashi, Masashi Suzuki, Toshifumi Yonai, Kosuke Yamaya, Shoji Kakio, Kazuhito Kishida, Shiori Asakawa, Hiroyuki Kuwae, Jun Mizuno

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

To obtain a bonded structure with low attenuation for longitudinal leaky surface acoustic waves (LLSAWs), the propagation and resonance properties on a LiTaO3 (LT) thin plate bonded to an X-cut quartz substrate were theoretically analyzed. The attenuation on the metallized surface of an X-cut 31°Y-propagating LT (X31°Y-LT)/X32°Y-quartz structure was calculated to be 0.0005 dB/1 at the normalized LT thin-plate thickness h/λ=0.062 (λ: wavelength) and was lower than that on an X31°Y-LT/AT45°X-quartz structure. Using a finite element method (FEM) system, for the X31°Y-LT/X32°Y-Q model, the admittance ratio and Q factor were improved to 117 dB and 57,000 from 63 dB and 1,100 for the X31°Y-LT/AT45°X-Q model, respectively. On the basis of these results, several bonded samples were fabricated, and the propagation and resonance properties were measured. For the X31°Y-LT/X32°Y-Q, the measured electromechanical coupling factor (K 2 ) and Q factor increased to 5.6% and 282 from 1.8% and 32 for the single LT, respectively. The temperature coefficient of frequency (TCF) of the LLSAW was measured to be -26.2 ppm/°C.

本文言語English
ホスト出版物のタイトル2018 IEEE International Ultrasonics Symposium, IUS 2018
出版社IEEE Computer Society
ISBN(電子版)9781538634257
DOI
出版ステータスPublished - 2018 12 17
イベント2018 IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
継続期間: 2018 10 222018 10 25

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2018-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2018 IEEE International Ultrasonics Symposium, IUS 2018
国/地域Japan
CityKobe
Period18/10/2218/10/25

ASJC Scopus subject areas

  • 音響学および超音波学

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