Low temperature direct bonding of polyether ether ketone (PEEK) and Pt

Weixin Fu; Akitsu Shigetou; Shuichi Shoji; Jun Mizuno

doi:10.1109/IMPACT.2015.7365179

Low temperature direct bonding of polyether ether ketone (PEEK) and Pt

Weixin Fu, Akitsu Shigetou, Shuichi Shoji, Jun Mizuno

ナノ・ライフ創新研究機構

研究成果

2 被引用数 (Scopus)

抄録

The direct bonding between polyether ether ketone (PEEK) and Pt was feasible at 150 °C via the surface modification using vacuum ultraviolet (VUV). This technology will be of practical use in the eco-friendly fabrication of light-weight and bio-inert electronic system, such as a body-implantation medical device. The VUV irradiation helped creating the bridging layers, which consisted of hydroxyl groups due to the residual water molecules inside the bonding chamber, both on PEEK and Pt surfaces. Upon heating at 150 °C, the Pt ions diffused into PEEK side as the micro-grains at the PEEK-Pt interface, and a voidless interface was successfully obtained with the calculated bonding strain release energy of around 4.2 N/m. This energy is higher than the surface energy of both PEEK and Pt.

本文言語	English
ホスト出版物のタイトル	2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015 - Proceedings
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	217-220
ページ数	4
ISBN（印刷版）	9781467383561
DOI	https://doi.org/10.1109/IMPACT.2015.7365179
出版ステータス	Published - 2015 12 23
イベント	10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015 - Taipei, Taiwan, Province of China 継続期間: 2015 10 21 → 2015 10 23

Other

Other	10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015
国/地域	Taiwan, Province of China
City	Taipei
Period	15/10/21 → 15/10/23

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
電子工学および電気工学

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10.1109/IMPACT.2015.7365179

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Fu, W., Shigetou, A., Shoji, S., & Mizuno, J. (2015). Low temperature direct bonding of polyether ether ketone (PEEK) and Pt. In 2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015 - Proceedings (pp. 217-220). [7365179] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMPACT.2015.7365179

Fu, W, Shigetou, A, Shoji, S & Mizuno, J 2015, Low temperature direct bonding of polyether ether ketone (PEEK) and Pt. in 2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015 - Proceedings., 7365179, Institute of Electrical and Electronics Engineers Inc., pp. 217-220, 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2015, Taipei, Taiwan, Province of China, 15/10/21. https://doi.org/10.1109/IMPACT.2015.7365179

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abstract = "The direct bonding between polyether ether ketone (PEEK) and Pt was feasible at 150 °C via the surface modification using vacuum ultraviolet (VUV). This technology will be of practical use in the eco-friendly fabrication of light-weight and bio-inert electronic system, such as a body-implantation medical device. The VUV irradiation helped creating the bridging layers, which consisted of hydroxyl groups due to the residual water molecules inside the bonding chamber, both on PEEK and Pt surfaces. Upon heating at 150 °C, the Pt ions diffused into PEEK side as the micro-grains at the PEEK-Pt interface, and a voidless interface was successfully obtained with the calculated bonding strain release energy of around 4.2 N/m. This energy is higher than the surface energy of both PEEK and Pt.",

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Low temperature direct bonding of polyether ether ketone (PEEK) and Pt

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