We report that fully ordered L10 FePt magnetic thin films with high coercivity can be fabricated by a simple sputtering method at a substrate temperature of 300°C. Although fcc → L10 ordering proceeds only above 600°C in ex situ annealing of disordered FePt films, the ordering occurs spontaneously by surface diffusion during the sputtering process of FePt alloy upon heating the substrate at 300°C. High coercivity larger than 7 kOe was achieved from the as-sputtered state.
|ジャーナル||Japanese Journal of Applied Physics, Part 2: Letters|
|出版ステータス||Published - 2001 12月 15|
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