Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer

Weixin Fu*, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

*この研究の対応する著者

研究成果: Article査読

4 被引用数 (Scopus)

抄録

A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.

本文言語English
論文番号02BB01
ジャーナルJapanese journal of applied physics
57
2
DOI
出版ステータスPublished - 2018 2月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル