抄録
A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.
| 元の言語 | English |
|---|---|
| 記事番号 | 02BB01 |
| ジャーナル | Japanese Journal of Applied Physics |
| 巻 | 57 |
| 発行部数 | 2 |
| DOI | |
| 出版物ステータス | Published - 2018 2 1 |
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ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
これを引用
Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer. / Fu, Weixin; Ma, Bo; Kuwae, Hiroyuki; Shoji, Shuichi; Mizuno, Jun.
：: Japanese Journal of Applied Physics, 巻 57, 番号 2, 02BB01, 01.02.2018.研究成果: Article
}
TY - JOUR
T1 - Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer
AU - Fu, Weixin
AU - Ma, Bo
AU - Kuwae, Hiroyuki
AU - Shoji, Shuichi
AU - Mizuno, Jun
PY - 2018/2/1
Y1 - 2018/2/1
N2 - A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.
AB - A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.
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UR - http://www.scopus.com/inward/citedby.url?scp=85040942430&partnerID=8YFLogxK
U2 - 10.7567/JJAP.57.02BB01
DO - 10.7567/JJAP.57.02BB01
M3 - Article
AN - SCOPUS:85040942430
VL - 57
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 2
M1 - 02BB01
ER -