Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer

研究成果: Article

3 引用 (Scopus)

抄録

A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.

元の言語English
記事番号02BB01
ジャーナルJapanese Journal of Applied Physics
57
発行部数2
DOI
出版物ステータスPublished - 2018 2 1

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Self assembled monolayers
Surface treatment
high strength
packaging
pretreatment
Temperature
Packaging
X ray photoelectron spectroscopy
photoelectron spectroscopy
evaluation
x rays

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

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abstract = "A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.",
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AU - Ma, Bo

AU - Kuwae, Hiroyuki

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AU - Mizuno, Jun

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