Heusler alloy-based lateral spin valves with ohmic contacts are prepared for the Co2Fe(Ga0.5Ge0.5)/Cu system by means of the top-down microfabrication process. The magneto-transport and microstructure are characterized to investigate the influence of the microfabrication route on the spin dependent transport of lateral spin valves systematically. A large non-local spin signal (?RS) of 17.3mΩ is observed at room temperature, which is attributed to the highly spin-polarized Co 2Fe(Ga0.5Ge0.5) ferromagnet and the clean Co2Fe(Ga0.5Ge0.5)/Cu interfaces confirmed by transmission electron microscopy. Based on the general expression of one-dimensional spin diffusion model, we discuss the importance of interfacial spin polarization in Heusler alloy-based lateral spin valves.
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